MKS Instruments, Inc. : MKS' MGS300 CEMS achieves TÜV certification

Continuous emissions monitor integrates MultiGas™ 2030 FTIR spectrometer

Andover, MA, January 21, 2014 - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has announced TÜV certification for the MGS300 CEMS for stationary emission sources such as incinerators, power plants and cement kilns. A continuous emissions monitoring system, the MGS300 with a core MultiGas™ 2030 FTIR spectrometer provides real-time analysis from a single FTIR analyzer of a broad range of gaseous components over the most challenging of certification ranges.

The MGS300 is fully automated and capable of directly analyzing hot, wet samples (i.e. without the need for sample pre-treatment), including the analysis of low-level gas components in the presence of up to 40% water. Its components include a sample probe (with integral filters), heated sample lines and an ejector pump to facilitate the continuous flow of sample through the system. TÜV certification qualifies the MGS300 for use in monitoring CO, CO2, NO, NO2, N2O, NH3, SO2, HCl, HF, CH4, and H2O over a series of different composition ranges.

The MultiGas™ 2030 technology incorporates a permanent library of calibration references which eliminate the need for expensive span gases and time consuming calibration routines. The ability to achieve these certification ranges was proven after exhaustive testing by TÜV during both laboratory and field phases of the certification process.

Note to editors: To download a photo of the MGS300 CEMS with MultiGas™ 2030 FTIR spectrometer, please go to the MKS web site: http://www.mksinst.com/photos.

Learn more:

MGS300 System - Certified FTIR-based Continuous Emissions Monitoring System (CEMS)
MGS300-KIT - FTIR-based Continuous Emission Monitoring System (CEMS) Integrator Kit

About MKS:

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, light emitting diodes, data storage media, and other advanced coatings. We also leverage our technology in other markets with advanced manufacturing applications including medical equipment, pharmaceutical manufacturing, energy generation, and environmental monitoring.