Edwards : Shows World-Leading Vacuum and Abatement Systems at Semicon China 2014

Edwards Shows World-Leading Vacuum and Abatement Systems at Semicon China 2014 18 March, 2014

CRAWLEY, WEST SUSSEX, UK. (18 March 2014) - Edwards Limited, a leading manufacturer of sophisticated vacuum products and abatement systems and a global provider of related value-added services, is showcasing a range of high-performance vacuum pumps, including the recently introduced STP-iXA4506 large-capacity turbomolecular pump (TMP), at SEMICON® China, in the Shanghai New International Expo Centre (SNIEC), from 18-20 March. SEMICON China continues to be the leading event where capital equipment makers can show their products and technologies to what is now the world's largest market for integrated circuits.

A well established global brand headquartered in the UK, Edwards' vacuum and abatement technology contributes to the reduction of pollution, energy consumption and running costs across the complete semiconductor spectrum, including the LED, solar PV, and flat-panel display (FPD) sectors.

"China's semiconductor industry continues to exhibit strong growth," noted Maiku Boger, Global Market Sector Manager Semiconductors at Edwards, "driven in particular by domestic production. China's strategic goals include new energy sources and environmental sustainability, so solar PV, FPDs and compound semiconductors are included in the very wide range of industry sectors where China is now a dynamically competitive player. Our vacuum and abatement systems are absolutely central to the supply chain that feeds this giant undertaking, which in 2005 was acknowledged to be the world's largest market for semiconductor chips."

Edwards' vacuum and abatement systems mitigate a range of environmental threats, including the acidic and corrosive gases that can accompany semiconductor production, and they assist users in achieving a carbon-negative footprint. Edwards offers its energy efficient solutions in a range of innovative yet proven pumps and systems, all available at relatively low rates of capital investment and maintenance cost.

A key objective for Edwards in China is to provide customised vacuum solutions and value-added service according to customers' specific requirements, in order to help them meet the challenges they encounter in advanced process and equipment manufacturing. Where abatement is the requirement, Edwards is able to offer its systems on a turnkey basis.

In Shanghai, the showpiece will be the new STP-iXA4506 large-capacity turbomolecular pump (TMP), designed to deliver significant savings for cost-sensitive manufacturers of semiconductors, FPDs, LEDs and solar panels. The pump's high speed (4300 l/s N2) and throughput (up to 4300 sccm N2), combined with its ability to efficiently pump both light and heavy gases, make the STP-iXA4506 ideal for a wide range of large-volume, high-flow applications, including semiconductor etch, LCD etch, glass coating, solar physical-vapour deposition (PVD) and coating PVD.

Other products on display at the Edwards booth include the iH600, iXM1200 / 1800, STP iXA3306, and iXH645H pumps:

• The iH600 dry pump offers high reliability for difficult processes such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

• Receiving a first China showing is the iXM1200 / iXM1800. This iXM pump is optimised for energy-efficiency with exceptionally low power input. It also has best in class powder handling and corrosion resistance for maximum reliability and extended pump life.

• The STP-iXA3306 magnetically levitated turbomolecular pump has a fully integrated onboard controller, eliminating the need for a connection cable between the pump and control unit. This also eliminates the installation space and cost that would be required by a conventional rack-type control unit.

• The iXH645H dry pump has been optimised for MOCVD processes used in LED manufacturing and other forms of compound semiconductor production. The advanced technology of this iXH pump minimises maintenance requirements and maximises pump uptimes, helping to lower the cost-of-ownership.

All visitors to SEMICON China 2012 are welcome to visit the Edwards booth, No. 1014 in Hall N1, where company representatives and application experts will be on hand to discuss which pumps and systems are the right solution for you.

Edwards' participation in SEMICON China indicates both the company's absolute commitment to its China customers and its growing presence in the PRC. That presence now includes two important manufacturing sites that greatly enhance Edwards' local capabilities in China and reinforce the world-class service and support the company extends to its China customers.

Further information about SEMICON China 2014 is available at: http://www.semiconchina.org/.