Axcelis Technologies, Inc. announced multiple new penetrations and follow-on shipments of the Purion Power Series ion implanter systems. The shipments were delivered to fabs throughout Asia, Europe and the US operated by leading SiC power device chipmakers. The models of Purion Power Series implanters purchased, including the Purion H200 high current, Purion XE high energy and the Purion M medium current implanters, will be used in high volume production of power devices supporting automotive industry EV applications.
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- Axcelis Technologies, Inc. Announces Multiple New Penetrations and Follow-on Shipments of Purion Power Series Implanters to Silicon Carbide Chipmakers Globally